Article
Engineering, Electrical & Electronic
Samaneh Jafarpour, Hamid Naghshara, Bagher Aslibeiki
Summary: This study examines the properties of LiAlO2 thin films and compares them to Al2O3 and Li2O thin films for their potential use as ion-conducting dielectrics in metal-insulator-metal (MIM) capacitors. The reactive magnetron co-sputtering method is introduced for depositing LiAlO2, resulting in a smooth and uniform amorphous film with high transparency and a wide band gap. The incorporation of lithium ions into the alumina leads to enhanced conductivity and dielectric properties, making it a promising material for thin film capacitors with better energy storage performance and lower loss.
ACS APPLIED ELECTRONIC MATERIALS
(2023)
Article
Materials Science, Ceramics
Pakinee Thongrit, Chanunthorn Chananonnawathorn, Mati Horprathum, Narit Triamnak, Tossaporn Lertvanithphol, Sukum Eitssayeam, Kamonpan Pengpat, Patamas Bintachitt
Summary: In this research, high-quality PZT thin films were deposited on (111)Pt/Ti/SiO2/(100)Si substrates by RF magnetron sputtering. Annealing at different temperatures improved the microstructure and properties of the thin films. The results showed that annealing temperature influenced the film thickness, density, and crystallinity of PZT films.
CERAMICS INTERNATIONAL
(2023)
Article
Chemistry, Physical
Kavita Sahu, Aditi Bisht, Alapan Dutta, Tapobrata Som, Satyabrata Mohapatra
Summary: Plasmonic nanocomposite thin films of Au-Cu2O-CuO were fabricated by RF magnetron co-sputtering and thoroughly analyzed by various techniques. The nanocomposite thin film showed excellent photocatalytic performance for organic pollutants degradation and significant catalytic activity for 4-NP transformation. The presence of Au nanoparticles in the Cu2O-CuO thin film improved charge separation and transport, enhancing the catalytic and photocatalytic features of the nanocomposite.
SURFACES AND INTERFACES
(2021)
Article
Materials Science, Ceramics
Prashant Thapliyal, Alok S. Kandari, Vijendra Lingwal, N. S. Panwar, G. Mohan Rao
Summary: The study investigated the characteristics of (Ta2O5)1-x- (TiO2)x (TTOx) thin films prepared with different compositions and annealing temperatures, revealing that the film with x = 0.06 and annealed at 700°C exhibited the highest dielectric constant and lower leakage current density, making it suitable for high-density silicon memory devices.
CERAMICS INTERNATIONAL
(2021)
Article
Materials Science, Ceramics
Prashant Thapliyal, N. S. Panwar, G. Mohan Rao
Summary: Tantalum and titanium thin films were deposited by DC magnetron sputtering in varying oxygen environments, with annealing temperatures affecting the structure and properties. Films annealed at 800°C exhibited the lowest leakage current density, while TTO0.03 films annealed at 700°C showed the highest dielectric constant. The optical parameters of the films were evaluated, showing changes in refractive index, extinction coefficient, and optical band gap with increasing annealing temperature. Different current conduction mechanisms were observed in the prepared metal-oxide-semiconductor structures.
CERAMICS INTERNATIONAL
(2021)
Article
Engineering, Electrical & Electronic
Chunhu Zhao, Junfeng Liu, Yixin Guo, Yanlin Pan, Xiaobo Hu, Guoen Weng, Jiahua Tao, Jinchun Jiang, Shaoqiang Chen, Pingxiong Yang, Junhao Chu
Summary: The study optimized aluminum doped ZnO thin films using RF magnetron sputtering, achieving high-quality optical and electrical properties. The optimized films demonstrated excellent optical and electrical characteristics at low resistivity, making them suitable as front contact layers in solar cell applications.
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
(2021)
Article
Chemistry, Physical
D. A. Granada-Ramirez, A. Pulzara-Mora, C. A. Pulzara-Mora, A. Pardo-Sierra, A. Cardona-Bedoya, M. Perez-Gonzalez, S. A. Tomas, S. Gallardo-Hernandez, J. G. Mendoza-Alvarez
Summary: InGaN thin films were deposited on silicon substrates using RF magnetron sputtering, and the In content was controlled by adjusting the substrate temperature. The optical and structural properties of the films were analyzed, and it was found that the band gap energy increased with temperature.
APPLIED SURFACE SCIENCE
(2022)
Article
Materials Science, Multidisciplinary
Qiang Li, Cheng Chen, Mingge Wang, Yaohui Lv, Yulu Mao, Manzhang Xu, Yingnan Wang, Xuewen Wang, Zhiyong Zhang, Shouguo Wang, Wu Zhao, Johan Stiens
Summary: SiCN thin films were prepared by radio frequency reactive magnetron sputtering method under different conditions, and their microstructure, morphology, optical, and field emission properties were studied. It was found that the high-quality SiCN thin films can be tailored by the preparation conditions, showing potential for optoelectronic device development.
JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T
(2021)
Article
Materials Science, Ceramics
Subhashis Samanta, Brijmohan Paramanik, Debajyoti Das
Summary: This manuscript presents a study on the structural characteristics, impedance spectroscopy, ac-conductivity, and dielectric loss of F-doped ZnO films grown by RF-magnetron sputtering at different temperatures. The results show that the electrical impedance spectroscopy can distinguish the contributions of grain and grain-boundary on the electronic properties. The ac-conductivity follows Jonscher power law, indicating hopping of charge carriers under ac electric field. The temperature-dependent dc-conductivity exhibits Arrhenius behavior. The dielectric loss is influenced by the doping level, with the low temperature grown samples showing higher conduction loss.
CERAMICS INTERNATIONAL
(2022)
Article
Engineering, Electrical & Electronic
S. Gautam, Ajay Kumar Verma, Aniket Balapure, B. Singh, Ramakrishnan Ganesan, M. Senthil Kumar, V. N. Singh, Bhasker Gahtori, S. S. Kushvaha
Summary: In this study, Bi2Se3 thin films were successfully fabricated on Si (100) substrates using RF magnetron sputtering. The as-deposited films exhibited a pure hexagonal phase and stoichiometric composition of Bi2Se3. Various analyses revealed their high-purity nature and good electrical conductivity, making them promising candidates for future thermoelectric devices.
JOURNAL OF ELECTRONIC MATERIALS
(2022)
Article
Chemistry, Physical
Hyun Min Kim, Jong Hoon Lee, Ahram Yom, Han Sol Lee, Dong Geun Kim, Dong Wan Ko, Hong Seung Kim, Ji-Hoon Ahn
Summary: SrRuO3 thin films have the potential for use as electrode layers, with key parameters such as oxygen flow ratio and post-deposition conditions needing to be carefully controlled for high-quality films to be deposited on SiO2 substrates.
JOURNAL OF ALLOYS AND COMPOUNDS
(2021)
Article
Materials Science, Ceramics
Khan Alam, Mohammad B. Haider, Mohammad F. Al-Kuhaili, Khalil A. Ziq, Bakhtiar Ul Haq
Summary: Chromium nitride thin films were prepared by reactive radio frequency magnetron sputtering, and their properties were studied in relation to the nitrogen to argon flow rate ratio and film composition. The results show that the film composition, band gap, and electronic phase transition are influenced by the gas flow ratio and film composition.
CERAMICS INTERNATIONAL
(2022)
Article
Chemistry, Physical
Fang Wang, Cong Zhu, Shifeng Zhao
Summary: Lead-free perovskite-structured Na0.5Bi0.5TiO3 (NBT) thin films prepared by sol-gel technology exhibit good energy storage performance, with a recoverable energy density of 23.3 J/cm(3) and energy storage efficiency of 61.6%, making them promising for capacitors with high energy storage properties.
JOURNAL OF ALLOYS AND COMPOUNDS
(2021)
Article
Chemistry, Physical
Masami Aono, Masami Terauchi, Kyoji Morita, Tasuku Inoue, Kazuhiro Kanda, Ken Yonezawa
Summary: In this study, a-CNx thin films were deposited through RF magnetron sputtering with increasing nitrogen gas pressure to provide nitrogen radicals at high concentrations. The films' chemical bonding structures were evaluated using XPS, SXES, and NEXAFS, and compared with films deposited under uniform gas pressure. Increasing the gas pressure around the graphite target slightly increased the deposition rate and changed the chemical bonding structure of a-CNx films. However, the nitrogen content did not increase with the nitrogen gas pressure. The nitrogen incorporation in a-CNx films was more effective at higher RF powers, as indicated by SXES and NEXAFS spectra.
APPLIED SURFACE SCIENCE
(2023)
Article
Materials Science, Multidisciplinary
Justin Ryan Phelps, Ashwin Kumar Saikumar, Reza Abdolvand, Kalpathy B. B. Sundaram
Summary: This study reports the material properties of gallium-doped zinc oxide grown from a high impulse magnetron sputtering system (HiPIMS) and compares them to those of radio frequency (RF) sputtering deposition. The results show that HiPIMS and RF processes yield similar outcomes under the same average power conditions. RF depositions exhibit slightly higher band gap and deposition rate, as well as lower resistivity and optical absorption coefficient. Both methods show that band gaps and grain size increase with deposition power.
Article
Chemistry, Physical
Z. L. Ma, C. M. Gourlay
JOURNAL OF ALLOYS AND COMPOUNDS
(2017)
Article
Chemistry, Physical
H. Shang, Z. L. Ma, S. A. Belyakov, C. M. Gourlay
JOURNAL OF ALLOYS AND COMPOUNDS
(2017)
Article
Multidisciplinary Sciences
Z. L. Ma, S. A. Belyakov, K. Sweatman, T. Nishimura, T. Nishimura, C. M. Gourlay
NATURE COMMUNICATIONS
(2017)
Article
Materials Science, Multidisciplinary
Z. L. Ma, J. W. Xian, S. A. Belyakov, C. M. Gourlay
Article
Materials Science, Multidisciplinary
Youde Tan, Hongnian Cai, Xingwang Cheng, Zhaolong Ma, Ziqi Xu, Zhifang Zhou
Article
Physics, Condensed Matter
Shuai Ma, Xingwang Cheng, Zhaolong Ma, Zhijun Xu, Ruiqing Chu
SOLID STATE COMMUNICATIONS
(2018)
Article
Chemistry, Physical
Shuai Ma, Xingwang Cheng, Tayyeb Ali, Zhaolong Ma, Zhijun Xu, Ruiqing Chu
APPLIED SURFACE SCIENCE
(2019)
Article
Materials Science, Ceramics
Wen Jiang, Xingwang Cheng, Zhiping Xiong, Zhaolong Ma, Tayyeb Ali, Hongnian Cai, Jian Zhang
CERAMICS INTERNATIONAL
(2019)
Article
Chemistry, Physical
Z. L. Ma, H. Shang, A. A. Daszki, S. A. Belyakov, C. M. Gourlay
JOURNAL OF ALLOYS AND COMPOUNDS
(2019)
Article
Nanoscience & Nanotechnology
Z. Q. Xu, Z. L. Ma, M. Wang, Y. W. Chen, Y. D. Tan, X. W. Cheng
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING
(2019)
Article
Engineering, Electrical & Electronic
Shuai Ma, Xingwang Cheng, Tayyeb Ali, Zhaolong Ma, Zhijun Xu, Ruiqing Chu
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
(2019)
Article
Materials Science, Multidisciplinary
Z. L. Ma, C. Li, S. Y. Yang, X. W. Cheng
Proceedings Paper
Engineering, Electrical & Electronic
Z. L. Ma, S. A. Belyakov, J. W. Xian, T. Nishimura, K. Sweatman, C. M. Gourlay
2018 7TH ELECTRONIC SYSTEM-INTEGRATION TECHNOLOGY CONFERENCE (ESTC)
(2018)
Article
Materials Science, Multidisciplinary
J. W. Xian, Z. L. Ma, S. A. Belyakov, M. Ollivier, C. M. Gourlay