Growth of micro- and nanocrystalline dual layer composite diamond films by microwave plasma CVD: Influence of CO 2 concentration on growth of nano-layer
Growth of micro- and nanocrystalline dual layer composite diamond films by microwave plasma CVD: Influence of CO 2 concentration on growth of nano-layer
Authors
Keywords
Micro- and nanocrystalline, Diamond film, Microwave plasma chemical vapor deposition, Grain size, Growth rate
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