Growth of micro- and nanocrystalline dual layer composite diamond films by microwave plasma CVD: Influence of CO 2 concentration on growth of nano-layer

标题
Growth of micro- and nanocrystalline dual layer composite diamond films by microwave plasma CVD: Influence of CO 2 concentration on growth of nano-layer
作者
关键词
Micro- and nanocrystalline, Diamond film, Microwave plasma chemical vapor deposition, Grain size, Growth rate
出版物
JOURNAL OF CRYSTAL GROWTH
Volume 410, Issue -, Pages 30-34
出版商
Elsevier BV
发表日期
2014-10-28
DOI
10.1016/j.jcrysgro.2014.10.040

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