Influence of annealing temperature on ZnO thin films grown by dual ion beam sputtering

Published 2014 View Full Article

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Title
Influence of annealing temperature on ZnO thin films grown by dual ion beam sputtering
Authors
Keywords
DIBSD, <em class=EmphasisTypeItalic >in situ</em> annealing, PL, XRD, XPS, ZnO
Journal
BULLETIN OF MATERIALS SCIENCE
Volume 37, Issue 5, Pages 983-989
Publisher
Springer Nature
Online
2014-09-19
DOI
10.1007/s12034-014-0035-0
References
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