Influence of annealing temperature on ZnO thin films grown by dual ion beam sputtering

标题
Influence of annealing temperature on ZnO thin films grown by dual ion beam sputtering
作者
关键词
DIBSD, <em class=EmphasisTypeItalic >in situ</em> annealing, PL, XRD, XPS, ZnO
出版物
BULLETIN OF MATERIALS SCIENCE
Volume 37, Issue 5, Pages 983-989
出版商
Springer Nature
发表日期
2014-09-19
DOI
10.1007/s12034-014-0035-0

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