Monolithic Integration of a Silicon Nanowire Field-Effect Transistors Array on a Complementary Metal-Oxide Semiconductor Chip for Biochemical Sensor Applications

Title
Monolithic Integration of a Silicon Nanowire Field-Effect Transistors Array on a Complementary Metal-Oxide Semiconductor Chip for Biochemical Sensor Applications
Authors
Keywords
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Journal
ANALYTICAL CHEMISTRY
Volume 87, Issue 19, Pages 9982-9990
Publisher
American Chemical Society (ACS)
Online
2015-09-09
DOI
10.1021/acs.analchem.5b02604

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