Influence of substrate annealing on inducing Ti3+ and oxygen vacancy in TiO2 thin films deposited via RF magnetron sputtering

Title
Influence of substrate annealing on inducing Ti3+ and oxygen vacancy in TiO2 thin films deposited via RF magnetron sputtering
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 462, Issue -, Pages 575-582
Publisher
Elsevier BV
Online
2018-08-18
DOI
10.1016/j.apsusc.2018.08.137

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