The effect of deposition atmosphere on the chemical composition of TiN and ZrN thin films grown by pulsed laser deposition

Published 2013 View Full Article

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Title
The effect of deposition atmosphere on the chemical composition of TiN and ZrN thin films grown by pulsed laser deposition
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 302, Issue -, Pages 124-128
Publisher
Elsevier BV
Online
2013-10-24
DOI
10.1016/j.apsusc.2013.10.095

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