The effect of deposition atmosphere on the chemical composition of TiN and ZrN thin films grown by pulsed laser deposition

出版年份 2013 全文链接

标题

作者

关键词

出版物

Volume 302, Issue -, Pages 124-128

出版商

Elsevier BV

发表日期

2013-10-24

DOI

10.1016/j.apsusc.2013.10.095

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