Oxygen-deficient indium tin oxide thin films annealed by atmospheric pressure plasma jets with/without air-quenching

Published 2013 View Full Article

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Title
Oxygen-deficient indium tin oxide thin films annealed by atmospheric pressure plasma jets with/without air-quenching
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 292, Issue -, Pages 213-218
Publisher
Elsevier BV
Online
2013-12-01
DOI
10.1016/j.apsusc.2013.11.118

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