In situ spectroscopic ellipsometry study of TiO2 films deposited by plasma enhanced chemical vapour deposition

Published 2013 View Full Article

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Title
In situ spectroscopic ellipsometry study of TiO2 films deposited by plasma enhanced chemical vapour deposition
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 283, Issue -, Pages 234-239
Publisher
Elsevier BV
Online
2013-07-06
DOI
10.1016/j.apsusc.2013.06.091

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