The morphology and chemistry evolution of fused silica surface after Ar/CF4 atmospheric pressure plasma processing

Published 2013 View Full Article

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Title
The morphology and chemistry evolution of fused silica surface after Ar/CF4 atmospheric pressure plasma processing
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 286, Issue -, Pages 405-411
Publisher
Elsevier BV
Online
2013-09-23
DOI
10.1016/j.apsusc.2013.09.100

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