The morphology and chemistry evolution of fused silica surface after Ar/CF4 atmospheric pressure plasma processing

标题
The morphology and chemistry evolution of fused silica surface after Ar/CF4 atmospheric pressure plasma processing
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 286, Issue -, Pages 405-411
出版商
Elsevier BV
发表日期
2013-09-23
DOI
10.1016/j.apsusc.2013.09.100

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