Ion beam nanoscale fabrication and lithography—A review

Published 2011 View Full Article

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Title
Ion beam nanoscale fabrication and lithography—A review
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 258, Issue 9, Pages 4103-4111
Publisher
Elsevier BV
Online
2011-12-01
DOI
10.1016/j.apsusc.2011.11.074

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