Ultra-fast photo-patterning of hydroxamic acid layers adsorbed on TiAlN: The challenge of modeling thermally induced desorption

Published 2012 View Full Article

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Title
Ultra-fast photo-patterning of hydroxamic acid layers adsorbed on TiAlN: The challenge of modeling thermally induced desorption
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 259, Issue -, Pages 406-415
Publisher
Elsevier BV
Online
2012-07-21
DOI
10.1016/j.apsusc.2012.07.059

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