Ultra-fast photo-patterning of hydroxamic acid layers adsorbed on TiAlN: The challenge of modeling thermally induced desorption

标题
Ultra-fast photo-patterning of hydroxamic acid layers adsorbed on TiAlN: The challenge of modeling thermally induced desorption
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 259, Issue -, Pages 406-415
出版商
Elsevier BV
发表日期
2012-07-21
DOI
10.1016/j.apsusc.2012.07.059

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