Modeling of altered layer formation during reactive ion etching of GaAs

Published 2012 View Full Article

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Title
Modeling of altered layer formation during reactive ion etching of GaAs
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 263, Issue -, Pages 626-632
Publisher
Elsevier BV
Online
2012-10-07
DOI
10.1016/j.apsusc.2012.09.123

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