Deposition and characterization of TiAlSiN nanocomposite coatings prepared by reactive pulsed direct current unbalanced magnetron sputtering

标题
Deposition and characterization of TiAlSiN nanocomposite coatings prepared by reactive pulsed direct current unbalanced magnetron sputtering
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 256, Issue 21, Pages 6420-6426
出版商
Elsevier BV
发表日期
2010-04-19
DOI
10.1016/j.apsusc.2010.04.028

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