Stabilization of a very high-k crystalline ZrO2 phase by post deposition annealing of atomic layer deposited ZrO2/La2O3 dielectrics on germanium

Published 2010 View Full Article

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Title
Stabilization of a very high-k crystalline ZrO2 phase by post deposition annealing of atomic layer deposited ZrO2/La2O3 dielectrics on germanium
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 256, Issue 16, Pages 5031-5034
Publisher
Elsevier BV
Online
2010-03-16
DOI
10.1016/j.apsusc.2010.03.049

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