Stabilization of a very high-k crystalline ZrO2 phase by post deposition annealing of atomic layer deposited ZrO2/La2O3 dielectrics on germanium

标题
Stabilization of a very high-k crystalline ZrO2 phase by post deposition annealing of atomic layer deposited ZrO2/La2O3 dielectrics on germanium
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 256, Issue 16, Pages 5031-5034
出版商
Elsevier BV
发表日期
2010-03-16
DOI
10.1016/j.apsusc.2010.03.049

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