Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process

Published 2010 View Full Article

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Title
Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 257, Issue 5, Pages 1562-1572
Publisher
Elsevier BV
Online
2010-09-03
DOI
10.1016/j.apsusc.2010.08.096

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