Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process

标题
Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 257, Issue 5, Pages 1562-1572
出版商
Elsevier BV
发表日期
2010-09-03
DOI
10.1016/j.apsusc.2010.08.096

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