Influence of postdeposition annealing on structural properties and electrical characteristics of thin Tm2O3 and Tm2Ti2O7 dielectrics

Title
Influence of postdeposition annealing on structural properties and electrical characteristics of thin Tm2O3 and Tm2Ti2O7 dielectrics
Authors
Keywords
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Journal
APPLIED SURFACE SCIENCE
Volume 256, Issue 9, Pages 2786-2791
Publisher
Elsevier BV
Online
2009-11-14
DOI
10.1016/j.apsusc.2009.11.029

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