Influence of postdeposition annealing on structural properties and electrical characteristics of thin Tm2O3 and Tm2Ti2O7 dielectrics

标题
Influence of postdeposition annealing on structural properties and electrical characteristics of thin Tm2O3 and Tm2Ti2O7 dielectrics
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 256, Issue 9, Pages 2786-2791
出版商
Elsevier BV
发表日期
2009-11-14
DOI
10.1016/j.apsusc.2009.11.029

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