Small size plasma tools for material processing at atmospheric pressure

Published 2008 View Full Article

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Title
Small size plasma tools for material processing at atmospheric pressure
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 255, Issue 10, Pages 5448-5452
Publisher
Elsevier BV
Online
2008-11-08
DOI
10.1016/j.apsusc.2008.10.082

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