Small size plasma tools for material processing at atmospheric pressure

标题
Small size plasma tools for material processing at atmospheric pressure
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 255, Issue 10, Pages 5448-5452
出版商
Elsevier BV
发表日期
2008-11-08
DOI
10.1016/j.apsusc.2008.10.082

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