Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films

Published 2007 View Full Article

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Title
Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 254, Issue 7, Pages 1953-1960
Publisher
Elsevier BV
Online
2007-08-22
DOI
10.1016/j.apsusc.2007.08.005

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