Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films

出版年份 2007 全文链接

标题

作者

关键词

出版物

Volume 254, Issue 7, Pages 1953-1960

出版商

Elsevier BV

发表日期

2007-08-22

DOI

10.1016/j.apsusc.2007.08.005

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