Passivation of GaAs surface by atomic-layer-deposited titanium nitride

Published 2008 View Full Article

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Title
Passivation of GaAs surface by atomic-layer-deposited titanium nitride
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 254, Issue 17, Pages 5385-5389
Publisher
Elsevier BV
Online
2008-04-15
DOI
10.1016/j.apsusc.2008.02.070

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