Passivation of GaAs surface by atomic-layer-deposited titanium nitride

标题
Passivation of GaAs surface by atomic-layer-deposited titanium nitride
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 254, Issue 17, Pages 5385-5389
出版商
Elsevier BV
发表日期
2008-04-15
DOI
10.1016/j.apsusc.2008.02.070

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