Defect states and charge trapping characteristics of HfO2 films for high performance nonvolatile memory applications

Title
Defect states and charge trapping characteristics of HfO2 films for high performance nonvolatile memory applications
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 105, Issue 17, Pages 172902
Publisher
AIP Publishing
Online
2014-10-30
DOI
10.1063/1.4900745

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