Low-resistivity C54-TiSi2 as a sidewall-confinement nanoscale electrode for three-dimensional vertical resistive memory

Title
Low-resistivity C54-TiSi2 as a sidewall-confinement nanoscale electrode for three-dimensional vertical resistive memory
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 105, Issue 18, Pages 182101
Publisher
AIP Publishing
Online
2014-11-05
DOI
10.1063/1.4901072

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