Atomic layer deposition of Zn(O,S) thin films with tunable electrical properties by oxygen annealing

标题
Atomic layer deposition of Zn(O,S) thin films with tunable electrical properties by oxygen annealing
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 102, Issue 13, Pages 132110
出版商
AIP Publishing
发表日期
2013-04-06
DOI
10.1063/1.4800928

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