Abrupt transitions in species number densities and plasma parameters in a CH3F/O2 inductively coupled plasma

Published 2013 View Full Article

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Title
Abrupt transitions in species number densities and plasma parameters in a CH3F/O2 inductively coupled plasma
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 102, Issue 3, Pages 034107
Publisher
AIP Publishing
Online
2013-01-25
DOI
10.1063/1.4789435
References
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