Abrupt transitions in species number densities and plasma parameters in a CH3F/O2 inductively coupled plasma

出版年份 2013 全文链接

标题

Abrupt transitions in species number densities and plasma parameters in a CH3F/O2 inductively coupled plasma

作者

关键词

-

出版物

APPLIED PHYSICS LETTERS

Volume 102, Issue 3, Pages 034107

出版商

AIP Publishing

发表日期

2013-01-25

DOI

10.1063/1.4789435

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