Micromachining along a curve: Femtosecond laser micromachining of curved profiles in diamond and silicon using accelerating beams

Title
Micromachining along a curve: Femtosecond laser micromachining of curved profiles in diamond and silicon using accelerating beams
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 101, Issue 7, Pages 071110
Publisher
AIP Publishing
Online
2012-08-15
DOI
10.1063/1.4745925

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