Structural-dependent thermal conductivity of aluminium nitride produced by reactive direct current magnetron sputtering

Title
Structural-dependent thermal conductivity of aluminium nitride produced by reactive direct current magnetron sputtering
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 101, Issue 15, Pages 151908
Publisher
AIP Publishing
Online
2012-10-12
DOI
10.1063/1.4757298

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