A dual-silicon-nanowires based U-shape nanoelectromechanical switch with low pull-in voltage

Title
A dual-silicon-nanowires based U-shape nanoelectromechanical switch with low pull-in voltage
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 100, Issue 11, Pages 113102
Publisher
AIP Publishing
Online
2012-03-13
DOI
10.1063/1.3693382

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