Vertically integrated submicron amorphous-In2Ga2ZnO7 thin film transistor using a low temperature process

Title
Vertically integrated submicron amorphous-In2Ga2ZnO7 thin film transistor using a low temperature process
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 100, Issue 20, Pages 203510
Publisher
AIP Publishing
Online
2012-05-20
DOI
10.1063/1.4717621

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