Saturation effects in femtosecond laser ablation of silicon-on-insulator

Published 2011 View Full Article

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Title
Saturation effects in femtosecond laser ablation of silicon-on-insulator
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 99, Issue 23, Pages 231108
Publisher
AIP Publishing
Online
2011-12-09
DOI
10.1063/1.3666423
References
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