Direct laser writing of amorphous silicon on Si-substrate induced by high repetition femtosecond pulses

Title
Direct laser writing of amorphous silicon on Si-substrate induced by high repetition femtosecond pulses
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 108, Issue 7, Pages 074907
Publisher
AIP Publishing
Online
2010-10-12
DOI
10.1063/1.3493192

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