Conductive atomic force microscopy studies on dielectric breakdown behavior of ultrathin Al2O3 films

Published 2011 View Full Article

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Title
Conductive atomic force microscopy studies on dielectric breakdown behavior of ultrathin Al2O3 films
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 9, Pages 092902
Publisher
AIP Publishing
Online
2011-03-04
DOI
10.1063/1.3560307
References
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