Semiconductor-metal transition in thin VO2 films grown by ozone based atomic layer deposition

Published 2011 View Full Article

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Title
Semiconductor-metal transition in thin VO2 films grown by ozone based atomic layer deposition
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 16, Pages 162902
Publisher
AIP Publishing
Online
2011-04-20
DOI
10.1063/1.3579195
References
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