Ohmic contact properties of magnetron sputtered Ti3SiC2 on n- and p-type 4H-silicon carbide

Published 2011 View Full Article

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Title
Ohmic contact properties of magnetron sputtered Ti3SiC2 on n- and p-type 4H-silicon carbide
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 4, Pages 042108
Publisher
AIP Publishing
Online
2011-01-29
DOI
10.1063/1.3549198
References
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