Ohmic contact properties of magnetron sputtered Ti3SiC2 on n- and p-type 4H-silicon carbide

标题
Ohmic contact properties of magnetron sputtered Ti3SiC2 on n- and p-type 4H-silicon carbide
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 98, Issue 4, Pages 042108
出版商
AIP Publishing
发表日期
2011-01-29
DOI
10.1063/1.3549198

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