In situ and noncontact measurement of silicon membrane thermal conductivity

Published 2011 View Full Article

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Title
In situ and noncontact measurement of silicon membrane thermal conductivity
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 17, Pages 174104
Publisher
AIP Publishing
Online
2011-04-28
DOI
10.1063/1.3583603
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