Thermal Conductivity Measurements on Polycrystalline Silicon Microbridges Using the 3ω Technique

Title
Thermal Conductivity Measurements on Polycrystalline Silicon Microbridges Using the 3ω Technique
Authors
Keywords
-
Journal
JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME
Volume 131, Issue 4, Pages 043201
Publisher
ASME International
Online
2009-03-05
DOI
10.1115/1.3072907

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