Effect of ZrOx/HfOx bilayer structure on switching uniformity and reliability in nonvolatile memory applications

Title
Effect of ZrOx/HfOx bilayer structure on switching uniformity and reliability in nonvolatile memory applications
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 97, Issue 17, Pages 172105
Publisher
AIP Publishing
Online
2010-10-28
DOI
10.1063/1.3491803

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