Effect of ZrOx/HfOx bilayer structure on switching uniformity and reliability in nonvolatile memory applications

标题
Effect of ZrOx/HfOx bilayer structure on switching uniformity and reliability in nonvolatile memory applications
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 97, Issue 17, Pages 172105
出版商
AIP Publishing
发表日期
2010-10-28
DOI
10.1063/1.3491803

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