III-V-semiconductor-on-insulator n-channel metal-insulator-semiconductor field-effect transistors with buried Al2O3 layers and sulfur passivation: Reduction in carrier scattering at the bottom interface

Title
III-V-semiconductor-on-insulator n-channel metal-insulator-semiconductor field-effect transistors with buried Al2O3 layers and sulfur passivation: Reduction in carrier scattering at the bottom interface
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 96, Issue 14, Pages 142106
Publisher
AIP Publishing
Online
2010-04-08
DOI
10.1063/1.3374447

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